1200°C Tube Furnace with Internal Travel Mechanism For HPCVD

Split Tube Furnace

• 208 - 240 VAC, 50/60Hz,  1.2 KW max. power consumption
• Working temperature:  1100°C continuous and 1200°C Max.
• 2" quartz tube (50mm O.D x 44mm I.D x 450mm L)  with vacuum sealed flanges.
• Optioanl:  you may choose dual zone tube furnace at Pic below right at extra cost to creat higher thermal gradient or longer constant temperature zone

                     -- two zone furnace       

Temperature Control

• PID automatic control via solid state relay with 30 steps programmable
• Built in Over Temperature and Thermocouple Failure Protection
• +/-1°C accuracy
• K-type thermal couple
• Heating zone  length:  200mm  ( 8")
• Constant temperature zone: 60 mm   (+/-1°C @ 1000 °C )

Vacuum Sealing

• 2" quick clamp flange with 1/4''  fittings, vacuum gauge as well as needle valve on the right side
• The right flange is connected to a stainless steel bellow which is stretchable up to 150 mm.
• Left flange with quick-clamped KF25 vacuum port and 1/4'' barb venting valve 
• Max. Vacuum level:  10E-2 torr by mechanical pump and 10-E5 by turbopump 

Internal Traveling Mechanism                     &
PLC Control Pannel

• One 1/4" Dia. x 24'' long K-type thermal couple is inserted through the right flange to support a mini-crucible boat in the chamber. 
• A step motor can drive the crucible inside the tube from the heating center to the right end of the furnace, 100 mm max.
• Touch screen control panel allows travel distance setting and temperature display of crucible position 
• Traveling speed is constant at 180mm/ min. ( variable speed control is available upon request at additional cost )
• A 50x20x20mm mini-crucible boat (~20ml) is installed on a thermal couple .
• AIN Sample Holder or Graphite Flat Substrate Holder for the wafer is available upon request, additional customization fee will apply.

Max. Heating & Cooling Rate

The max heating and cooling rate can be achieved by moving sample into pre-heated hot zone and move the sample out from hot zone.  The typical ramp/cool rate is listed in below:

 
Optional Parts

• You may need a right angle valve & bellows to connect a vacuum pump ( click the 1st & 2nd pics to order )
• Anti-Corrosive digital Gauge up to 10E-5 torr is optional for CVD application (Pic 3)
• You may order multi-channel gas delivery system for DVD or CVD operation ( Pic 4)

Dimensions

Warranty 

Two years limited warranty with lifetime support (Consumable parts such as tubes and o-rings are not covered by the warranty) 

Laptop, software & WiFi Control(Optional)

• Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
• Labview Based Temperature Control System) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
• A wireless remote control provides up to 300 meters operating range.
• Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
• Note: The software is only compatible with MTI’s Yudian Temperature Controller
•      

Compliance

• CE Certified
• All electric components ( >24V) are UL / MET / CSA certified
• The furnace is ready to pass TUV(UL61010)  or CSA certification at extra cost. （ please

Warning

• Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa
• Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. 
• Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C

Application Notes

This multi-functional furnace is suitable for the applications in below:

• RTE:  Crucible loaded with evaporation material is placed in the center of the furnace, move sample holder to a downstream position with appropriate temperature where the deposition takes place.
• HPCVD： Similar setup as RTE, we also introduce reactant gas to mix with evaporation vapor and make deposition
• Horizontal Bridgman Crystal Growth：  Load material and seed into a crucible and place it in the center of the furnace. Move the crucible at the desired speed to grow single crystal under suitable thermal gradient.
• If you have any question and suggestion, please contact us before purchasing
• After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low
• For Horizontal directional crystalization  (HDC), you may use a gas feedtrough as pic below：
•