1200℃ Hydrogen Tube Furnace With CVD System

Model Number:
TMAX-1200HTF
Compliance:
CE certificate
Warranty:
One year limited warranty with lifetime technical support
Payment:
T/T, Credit Card, Paypal, LC, Western Union
Delivery Time:
3 days

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Wechat : Wechat 13506084915

DESCRIPTION

1200℃ Hydrogen Tube Furnace With CVD System

A.Overview

The CVD system consists of a gas supply system + a tube furnace + a gas extraction system. The maximum temperature can reach 1200 degrees, 1400 degrees, 1600 degrees, and 1700 degrees. The heating zone can be single temperature zone, dual temperature zone, three temperature zone, etc., and the ultimate vacuum It can reach 10-3Pa. The air supply system can be a proton flow meter or a float flow meter with flow adjustment. The number of gas mixing channels can be 2 channels, 3 channels, 4 channels, and 5 channels.

This CVD system is composed of 3-way gas supply system + TL1200 hydrogen tube furnace + low vacuum system
This tube furnace uses imported resistance wire Sweden (Canthal) as the heating element, adopts a double-layer shell structure and an electronic temperature control instrument, can carry out 30-segment temperature control, phase shift trigger, and SCR control. The furnace adopts oxidation Aluminum polycrystalline fiber material has the advantages of balanced temperature field, low surface temperature, fast temperature rise and fall, and energy saving. It is an ideal product for universities, scientific research institutes, and industrial and mining enterprises for high-temperature atmosphere sintering, atmosphere reduction, CVD experiments, and vacuum annealing.

B.Specification

Type	TL1200-H-I	TL1200-H-II	TL1200-H-Ⅲ	TL1200-H-Ⅳ
Power	3.5KW	3.5KW	3.5KW	5KW
Tube size （OD, mm)	Dia60 X1000	Dia80X1000	Dia100X1000	Dia150X1000
Dimension(LDH)	17008001500	17008001500	17008001500	17008001500
Supply voltage	220V
Phase	Single phase
Heating element	Domestic high-quality resistance wire (optional Sweden Kanthal A1 imported resistance wire)
Temperature control	UAV program temperature control instrument (standard) 1.30 - stage program temperature control intelligent PID adjustment. 2.With over-temperature protection, the electric furnace heating circuit is automatically cut off when the temperature is over-temperature or broken, (when the electric furnace temperature exceeds 1200 degrees or the thermocouple is blown, the AC relay on the main circuit will be automatically disconnected, the main circuit is broken. On, the ON light on the panel is off, the OFF light is on, and the limited protection electric furnace). 3. With 485 communication interface (standard when purchasing software) 4. With power-off protection function, that is, when the power is turned on after the power is turned off, the program does not start from the starting temperature, but the furnace temperature rises from the time of power failure. 5. The meter has the function of temperature self-tuning If you want to get an imported temperature controller, you may have the following choices for replacement with extra fees.
Temperature control mode	Intelligent PID
Burnout protection and display	Yes
Over temperature protection	Yes
Overcurrent protection	Yes
Control accuracy	+/- 1 ℃
Trigger	Phase-shifted trigger
Electric appliance	Zhejiang chint
Silicon controlled	106/16E SEMIKRON
Maximum temperature	1200℃
Rated temperature	1100℃
Heating rate	≤30 ℃/ Min (it can be modified as required)
Recommended rate of temperature rise	≤15 ℃/ Min
Thermocouple Type	K Type
Heating length	440mm
Constant Heating length	150mm
Temperature field curve
Temperature calibration (optional)	Regular temperature calibration of the tube furnace maintains the accuracy and uniformity of the furnace temperature. You can purchase a simple calibration tool from the company to assist you with this work. The complete calibration kit includes a standard thermocouple S-type, temperature calibrator.
Peripheral surface temperature	≤45℃
Valve and Flange
Anti-explosion system	The explosion-proof system consists of a pressure sensor and an explosion-proof valve. The pressure sensor can set the alarm pressure on the pressure control gauge. When the pressure in the furnace tube is greater than or equal to the set alarm pressure, the explosion-proof solenoid valve will automatically start and release the excess gas in the furnace tube . The explosion-proof solenoid valve is composed of two check valves with opposite directions, which can be closed well in vacuum or atmosphere, without air leakage and reflux.
Hydrogen detector	The hydrogen gas detector is a safety instrument that can detect the flammability and explosiveness of hydrogen through an imported catalytic combustion sensor. It has the characteristics of explosion-proof and dust-proof, and can be widely used in places where hydrogen is stored, used and stored in petroleum, chemical industry, metallurgy, coal mines, etc.

C.Main parameters of GX gas supply system

GX gas supply system

Mass flowmeter	Range and gas	5, 10, 20, 30, 50, 100, 200, 300, 500SCCM, 1, 2, 3, 5, 10SLM (you can arbitrarily select the above range and the type of gas)
	Withstand voltage	3MP
	Flow control accuracy	±1.0%F.S
	Maximum working (use) pressure	0.3MPa
	Linear	±0.5%F.S
	Repeatability	±0.2% F.S
Ways	1, 2, 3, 4, 5, 6, 7, 8 channels (you can choose several channels)
Connector type	Double ferrule stainless steel joint
System working pressure range	0.1-0.5 MPa
Working temperature	5-45℃
Pressure vacuum gauge	-0.1-0.15 MPa 0.01MPa/div
Static mixing chamber	Dia50*400MM
Connector	Dia6 / 1/4”

D.VS-0.1 air extraction system(Option 1 or 2)

VS-0.1 air extraction system

Power supply	220V
Dimension	650X650X600 / 650X650X300
Bellows	KF25X1000mm
The vacuum degree of the furnace tube can be reached with this system	10 -1Pa
Vacuum flapper valve	KF25
VRD-8 vacuum pump (Option 1)	Model	VRD-8
	Ultimate partial pressure	5X10-2 Pa
	Inlet and exhaust interface	KF25
	Motor speed	1440RPM
	Pumping rate	2.2L/S
	Motor Power	0.4KW
Preiffer ACP15 oil-free multi-stage Roots pump (Option 2)	Model	ACP15
	Power supply	AC100-240 50/60HZ
	Power	450W
	Weight	25KG
	Maximum helium leak rate	5 · 10-8 Pa m3/s
	Pumping rate	14 m3/h
	Ultimate pressure	0.02Torr
	Inlet and exhaust interface	KF25
Resistance vacuum gauge (Option 1)	Model	ZDR-1
	Power	25W
	Vacuum measurement range	0.1-10 5 Pa
	Resistance silicon	ZJ-52T
Sweden (INFICON) Pirani ceramic capacitor vacuum gauge (Option 2)	Model	PCG554
	Input voltage	24V 1A DC (with 220V transformer)
	Vacuum gauge interface	KF16
	Digital Display	Digital display (screen size is 20x14mm), and its data display unit is torr
	Dimension	46mm×28mm×126mm ( L x W x H)
	Weight	5 lbs
	Detection gas	It can detect various gases, including mixed gases, with accurate measurement and good repeatability.
	Whether it is anticorrosive	Antiseptic
	Response time	≤30ms
	Measuring range	3.8x10-5 -1125 Torr.

E.Molecular pump unit (optional 1or2)

molecular pump unit

Unit input voltage	380V /220V
Bellows	KF40X1000
Vacuum flapper valve	KF40
Dimension	600X600X600
Molecular pump (Option 1)	Model	FJ620
	Input voltage	380V
	Molecular pump inlet flange	DN160
	Molecular pump pumping rate L/S (to air)	600
	Ultimate pressure of molecular pump (Pa)	6×10-7
	Cooling method	Water cooling
	Cooling water pressure (MPa)	0.1-0.2
	Cooling water temperature	<25℃
	Ambient temperature	0~40℃
	Recommended starting pressure	<100pa
Molecular pump front vacuum TRP-24 (FJ620 molecular pump must be equipped with previous stage pump) (Option 2)	Power	0.75KW
	Voltage	380V
	Rotating speed	1450rpm
	Inlet diameter	KF25/KF40
	Front machine pump suction rate (L/S)	6
	Ultimate pressure	4X10 -2Pa
German Pfeiffer vacuum pump (Option 2)	Voltage	220V
	Power	110W
	Suction port	KF40
	Weight	150KG
	Front pump pumping speed	0.9m 3/ h
	Pumping rate (N2)	33L/S
Compound vacuum gauge	Model	ZDF
	Power supply	220V 55W
	Control precision	± 1%
	Vacuum gauge measuring range	10-5 - 10 5 Pa

tube furnace

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Related Tags :

1200C Tube Furnace Hydrogen tube furnace tube furnace with CVD system

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