1200C Three Zones CVD Tube Furnace With 4 Channel MFC Gas Station

  • Model Number:

  • Compliance:

    CE certificate
  • Warranty:

    Two years limited warranty with lifetime technical support
  • Payment:

    T/T, Credit Card, Paypal, LC, Western Union
  • Delivery Time:

    3 days
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1200C Three Zones CVD Tube Furnace With 4 Channel MFC Gas Station

The TMAX-3-1200 series furnace workstation consists of three-zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-5 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and input the mixed gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protection.The furnace comes with a 4-channel digital LED display mas flow gas control station.


 tube furnace


Double layer steel casing with air cooling.
Built-in thermostat to control Cooling running automatically when case > 55°C.

Processing Tube

Material: Fused quartz tube

Thermal Block Placement



Rated Voltage

AC 208-240V Single phase, 50/60Hz

Heating Element

Fe-Cr-Al Alloy doped by Mo

Working Temp.

Max. Heating Temp.: 1200°C
Continuous Working Temp.: 1100°C

Heat-up Rate 

Heat-up rate: 1~20°C/min programmable

Heating Zone Length

Total heating zone: 900mm   (300mm + 300mm + 300mm)

Temp. Controller

  • Three precision temperature controllers to control three zones separately.
  • PID automatic control with 30 steps programmable segments.
  • Temperature accuracy: ±1°C
  • Thermocouple: K type built inside the furnace

Vacuum Seal

One pair of stainless steel vacuum flange with:
- one mechanical pressure gauge
- two needle valves 
- one KF-40 connector for the high vacuum station.

Rated Voltage

AC 208-240V Single Phase, 50/60Hz


1100(L) x 450(W) x 670(H), mm

High Vacuum Station


Mobile cart size:  600 (L) x 600 (W) x 700(H), mm
Max. Loading:       600 Lbs on top
Molecular pump control Panel :   LCD digital
Inside:   Pfeiffer vacuum pump  made in Germany
Vacuum sensor is included

Volume Flow Rate

Nitrogen   N2     33 L/s
Helium     He     39 L/s   (2340L/minute)
Hydrogen H2   32 L/s

Working Range

From 1000 mbar to <1E-7 mbar

Ultimate Pressure

<1E-8 mbar (without any leaking )

Voltage & Power

110VAC or 220VAC, 110W

Mass Flow Gas Control


  • 2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software
  • LED display
  • 4 channel MFC Made of 316 stainless steel with gas flow range as below:
    • Controller 1: 0~100SCCM
    • Controller 2: 1~199 SCCM
    • Controller 3: 1~199 SCCM
    • Controller 4: 1~499 SCCM
  • 4 Channel gas go through a Gas mixing tank: Φ80X120mm  
  • Dimension: 600(L) x 745(W) x 700(H), mm



Rated Voltage

AC 208-240V, Single phase, 50/60Hz

 Shipping & Warranty

Shipping Dimension

Total Three Pallets   ( #1: 60" x 45" x 40"    #2: 48" x 40" x 42"  #3: 48" x 40" x 42" )

Shipping Weight

850 lbs


Two years limited warranty 
(Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, 
please order the replacement at related products below.)


  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. (please click marks
CVD furnace


 battery equipment

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