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1200C Three Zones CVD Tube Furnace With 4 Channel MFC Gas Station

  • Model Number:

  • Compliance:

    CE certificate
  • Warranty:

    Two years limited warranty with lifetime technical support
  • Delivery Time:

    3 days
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1200C Three Zones CVD Tube Furnace With 4 Channel MFC Gas Station

The TMAX-3-1200 series furnace workstation consists of three-zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-5 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and input the mixed gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protection.The furnace comes with a 4-channel digital LED display mas flow gas control station.


 tube furnace


Double layer steel casing with air cooling.
Built-in thermostat to control Cooling running automatically when case > 55°C.

Processing Tube

Material: Fused quartz tube

Thermal Block Placement



Rated Voltage

AC 208-240V Single phase, 50/60Hz

Heating Element

Fe-Cr-Al Alloy doped by Mo

Working Temp.

Max. Heating Temp.: 1200°C
Continuous Working Temp.: 1100°C

Heat-up Rate 

Heat-up rate: 1~20°C/min programmable

Heating Zone Length

Total heating zone: 900mm   (300mm + 300mm + 300mm)

Temp. Controller

  • Three precision temperature controllers to control three zones separately.
  • PID automatic control with 30 steps programmable segments.
  • Temperature accuracy: ±1°C
  • Thermocouple: K type built inside the furnace

Vacuum Seal

One pair of stainless steel vacuum flange with:
- one mechanical pressure gauge
- two needle valves 
- one KF-40 connector for the high vacuum station.

Rated Voltage

AC 208-240V Single Phase, 50/60Hz


1100(L) x 450(W) x 670(H), mm

High Vacuum Station


Mobile cart size:  600 (L) x 600 (W) x 700(H), mm
Max. Loading:       600 Lbs on top
Molecular pump control Panel :   LCD digital
Inside:   Pfeiffer vacuum pump  made in Germany
Vacuum sensor is included

Volume Flow Rate

Nitrogen   N2     33 L/s
Helium     He     39 L/s   (2340L/minute)
Hydrogen H2   32 L/s

Working Range

From 1000 mbar to <1E-7 mbar

Ultimate Pressure

<1E-8 mbar (without any leaking )

Voltage & Power

110VAC or 220VAC, 110W

Mass Flow Gas Control


  • 2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software
  • LED display
  • 4 channel MFC Made of 316 stainless steel with gas flow range as below:
    • Controller 1: 0~100SCCM
    • Controller 2: 1~199 SCCM
    • Controller 3: 1~199 SCCM
    • Controller 4: 1~499 SCCM
  • 4 Channel gas go through a Gas mixing tank: Φ80X120mm  
  • Dimension: 600(L) x 745(W) x 700(H), mm



Rated Voltage

AC 208-240V, Single phase, 50/60Hz

 Shipping & Warranty

Shipping Dimension

Total Three Pallets    #1: 60" x 45" x 40"    #2: 48" x 40" x 42"  #3: 48" x 40" x 42" 

Shipping Weight

850 lbs


Two years limited warranty 
(Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, 
please order the replacement at related products below.)


  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. (please click marks

CVD furnace

1.  We supply machines with battery technology support.

2.  We supply full set of lithium battery equipment for lab research, pilot scale research and production line.

1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

3 Responsible for the damage during the shipping process, will change the damage part for you for free.

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