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1200°C Tube Furnace with Internal Travel Mechanism For HPCVD

  • Model Number:

    TMAX-1200X-S-HPCVD
  • Compliance:

    CE compliant
  • Warranty:

    Two years limited warranty with lifetime technical support
  • Delivery Time:

    3 days
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DESCRIPTION

1200°C Tube Furnace with Internal Travel Mechanism For HPCVD



TMAX-1200X-S-HPCVD is a compact 2" split tube furnace with internal sample traveling system inside the processing tube. This allows the position & temperature control of the sample stage or crucible via touch screen digital controller.  It is designed for multi-functional rapid thermal processing, such as hybrid physical-chemical deposition(HPCVD), rapid thermal evaporation (RTE), and as well Horizontal Bridgman Crystal Growth ( HDC) under various atmosphere for new generation crystal research.


SPECIFICATIONS:

Split Tube Furnace

  • 208 - 240 VAC, 50/60Hz,  1.2 KW max. power consumption
  • Working temperature:  1100°C continuous and 1200°C Max.
  • 2" quartz tube (50mm O.D x 44mm I.D x 450mm L)  with vacuum sealed flanges.
  • Optioanl:  you may choose dual zone tube furnace at Pic below right at extra cost to creat higher thermal gradient or longer constant temperature zone

                     -- two zone furnace       

Temperature Control

  • PID automatic control via solid state relay with 30 steps programmable
  • Built in Over Temperature and Thermocouple Failure Protection
  • +/-1°C accuracy
  • K-type thermal couple
  • Heating zone  length:  200mm  ( 8")
  • Constant temperature zone: 60 mm   (+/-1°C @ 1000 °C )

                      

Vacuum Sealing

  

 

  • 2" quick clamp flange with 1/4''  fittings, vacuum gauge as well as needle valve on the right side
  • The right flange is connected to a stainless steel bellow which is stretchable up to 150 mm.
  • Left flange with quick-clamped KF25 vacuum port and 1/4'' barb venting valve 
  • Max. Vacuum level:  10E-2 torr by mechanical pump and 10-E5 by turbopump 

     

Internal Traveling Mechanism                     &
PLC Control Pannel

  • One 1/4" Dia. x 24'' long K-type thermal couple is inserted through the right flange to support a mini-crucible boat in the chamber. 
  • A step motor can drive the crucible inside the tube from the heating center to the right end of the furnace, 100 mm max.
  • Touch screen control panel allows travel distance setting and temperature display of crucible position 
  • Traveling speed is constant at 180mm/ min. ( variable speed control is available upon request at additional cost )
  • A 50x20x20mm mini-crucible boat (~20ml) is installed on a thermal couple .
  • AIN Sample Holder or Graphite Flat Substrate Holder for the wafer is available upon request, additional customization fee will apply.

              

Max. Heating & Cooling Rate

The max heating and cooling rate can be achieved by moving sample into pre-heated hot zone and move the sample out from hot zone.  The typical ramp/cool rate is listed in below:

  Heating Rate:

 10°C/sec (150°C - 250°C);

  7°C/sec (250°C - 350°C);

  4°C/sec (350°C - 500°C);

  3°C/sec (500°C - 550°C);

  2°C/sec (550°C - 650°C);
  1°C/sec (650°C - 800°C);
  0.5°C/sec (800°C - 1000°C);

Cooling Rate:

10°C/sec (950°C - 900°C);

7°C/sec (900°C - 850°C);

4°C/sec (850°C - 750°C);

2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);

  


 

 
Optional Parts

  • You may need a right angle valve & bellows to connect a vacuum pump ( click the 1st & 2nd pics to order )
  • Anti-Corrosive digital Gauge up to 10E-5 torr is optional for CVD application (Pic 3)
  • You may order multi-channel gas delivery system for DVD or CVD operation ( Pic 4)

                      

Dimensions

   

Warranty 

Two years limited warranty with lifetime support (Consumable parts such as tubes and o-rings are not covered by the warranty) 

Laptop, software & WiFi Control(Optional)

  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: The software is only compatible with MTI’s Yudian Temperature Controller
  •      



Compliance

  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010)  or CSA certification at extra cost.  please

                 

Warning


  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. 
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C

Application Notes

This multi-functional furnace is suitable for the applications in below:

  • RTE:  Crucible loaded with evaporation material is placed in the center of the furnace, move sample holder to a downstream position with appropriate temperature where the deposition takes place.
  • HPCVD Similar setup as RTE, we also introduce reactant gas to mix with evaporation vapor and make deposition
  • Horizontal Bridgman Crystal Growth  Load material and seed into a crucible and place it in the center of the furnace. Move the crucible at the desired speed to grow single crystal under suitable thermal gradient.
  • If you have any question and suggestion, please contact us before purchasing
  • After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low
  • For Horizontal directional crystalization  (HDC), you may use a gas feedtrough as pic below


1200°C HPCVD Tube Furnace





1.  We supply machines with battery technology support.

2.  We supply full set of lithium battery equipment for lab research, pilot scale research and production line.




1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

3 Responsible for the damage during the shipping process, will change the damage part for you for free.



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