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1200°C Vertical PECVD Furnace With RF Generator, Gas Mix & Pumping System

  • Model Number:

    TMAX-VerticalPECVD
  • Compliance:

    CE certificate
  • Warranty:

    Two years limited warranty with lifetime technical support
  • Delivery Time:

    12 days
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DESCRIPTION

1200°C Vertical PECVD Furnace With RF Generator, Gas Mix & Pumping System


TMAX-1200-PECVD series Chemical Vapor Deposition (CVD) and Plasma-Enhanced Chemical Vapor Deposition (PECVD) multi-zone split tube furnaces feature the famous Kanthal® (Sweden) wire heating elements embedded in high quality Mitsubishi® (Japan) alumina fiber insulation. All steel dual-layer housing ensures durability and helps minimize heat loss to exterior surface.


Furnace operation is controlled by Shimaden® (Japan) 40-segment digital controller with built-in RS485 digital communications port and USB adaptor, allowing the user to connect to a PC for remote control and monitoring of the furnace. You can also save or export test results.
All our furnaces are CE compliant.
 

Features

·        Compact, portable and lightweight design.

·        Lower processing temperatures required compare to conventional CVDs.

·        Film stress can be controlled by high/low frequency mixing techniques.

·        Split furnace chamber for fast and easy tube access.

·        Standard package includes set of stainless steel vacuum sealing flanges with valves and pressure meter.

·        Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot.

·        Multiple atmosphere processes in a single cycle are possible (ex: binder burn out in air and parts sintering under rough vacuum or inert gas environment.)

·        Built-in amp meter and dual voltmeters for easy monitoring and troubleshooting.

·        Built-in computer interface.

·        Long life type K thermocouple.

·        Slidable furnace option gives you ultra fast cooling rates


Furnace, vacuum pump and gas mixing system specifications

 Tube material

 Quartz

 Heating element

 Kanthal® (Sweden) resistance coil wire

 Max. vs constant working temperatures

 1200°C max. and 1100°C constant

 Thermo couple type

 K

 Refractory lining

 Mitsubishi® (Japan) 1500 grade fiber alumina

 Temperature controller

 Shimaden® (Japan) fp93 with 4 programs and 40 segments
 (ie. 4 x 10 segments or 2 x 20 segments)

 Maximum heating & cooling rate  

 < 30°C / min

 Temperature controller precision

 +/- 1°C (+/- 1.8°F)

 Vacuum sealing flange kit

 Stainless steel vacuum sealing flanges with one vacuum gauge,
two valves and four thermal ceramic blocks.      

 Electrical requirements

 220VAC, 3.5KW, single phase

 

 RF generator specifications

 Electrical requirements

 208-240 volts 50/60 Hz

 Output power

 5 to 500 watts, adjustable in +/-1% step

 RF frequency

 13.56 MHz with +/-0.005% stability

 Reflection power

10 watts max.

 Matching

 Automatic

 RF output port

 50 Ω, N-type, female

 Cooling

 Air

 

 

Part description    

 

   

  Quantity   

 

 

Part image 

 

split tube furnace

 1 set

 Multi-channel gas supply system

1 set

 Plasma RF power supply (optional)

1 set

 Vacuum pump and enclosure (optional)

 1 set

 Quartz tube 

1 pc

 Teflon Tube(N Stand for number of tubes)

N*5

 Stainless steel vacuum sealing flanges w/ pressure meter  

 1 set

 Stainless steel hook

 1 pc

 Alumina ceramic thermal block

 2 pairs

 Thermal gloves

 1 pair

 High temperature Al2O3 alumina crucible 

 5 pcs

 Spare fuse

2 pcs

 USB/RS485 computer interface kit

 1 set

 Furnace and Shimaden controller manual

2 pcs

 


PECVD furnace

1.  We supply machines with battery technology support.

2.  We supply full set of lithium battery equipment for lab research, pilot scale research and production line.



1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

3 Responsible for the damage during the shipping process, will change the damage part for you for free.


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