1200℃ Dual-tube Furnace With Double PEVCD System

Model Number:
TMAX-1200DTFDPS
Compliance:
CE certificate
Warranty:
One year limited warranty with lifetime technical support
Payment:
T/T, Credit Card, Paypal, LC, Western Union
Delivery Time:
3 days

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DESCRIPTION

1200℃ Dual-tube Furnace With Double PEVCD System

A.Overview

The dual-tube furnace with double PECVD system consists of a dual-tube furnace, a quartz vacuum chamber, a radio frequency power supply, a GX gas supply system, a gas extraction system, and a vacuum measurement system.

main feature:

1. The gas in the quartz vacuum chamber is changed to ion state by radio frequency power supply.
2. PECVD requires a lower temperature than ordinary CVD for chemical vapor deposition.
3. The stress of the deposited film can be controlled by the frequency of the RF power supply.
4. PECVD has higher chemical vapor deposition rate, better uniformity, consistency and stability than ordinary CVD.
5. Widely used in the growth of various thin films, such as SiOx, SiNx, SiOxNy and amorphous silicon (a-Si:H).

This TL1200-1200 dual-temperature zone dual-tube PECVD system uses resistance wire as the heating element, adopts a double-layer shell structure and 30-segment temperature control instrument, phase-shifting trigger, thyristor control, and the furnace adopts Japanese molding technology. Crystal fiber material. Both ends of the furnace tube can be sealed with stainless steel flanges. Gas nozzles, valves and pressure gauges are installed on the stainless steel flanges. The vacuum degree can reach 10-3 Pa when vacuuming. It has a balanced temperature field, low surface temperature, and lift The advantages of fast temperature rate, energy saving, preferential price and so on. The double-tube tube furnace is different from the ordinary tube furnace in that it is composed of double tubes with a substrate coated on the inner tube to form a ring shape, which can greatly increase the CVD growth area.

B.Specification

Type	TL1200-1200-PECVD-I	TL1200-1200-PECVD-II
Power	3.6KW	3.6KW
Outer tube size （OD, mm)	Dia 80(OD) X1200mm	Dia 100（OD) X1200mm
Inner ube size （OD, mm)	Dia 60(OD) X1400mm	Dia 80(OD) X1400mm
Dimension(LDH)	1800X500X1200	1800X550X1200
Supply voltage	220V
Phase	Single phase
Heating element	Domestic high-quality resistance wire (optional Sweden Kanthal A1 imported resistance wire)
Temperature control	UAV program temperature control instrument (standard) 1.30 - stage program temperature control intelligent PID adjustment. 2.With over-temperature protection, the electric furnace heating circuit is automatically cut off when the temperature is over-temperature or broken, (when the electric furnace temperature exceeds 1200 degrees or the thermocouple is blown, the AC relay on the main circuit will be automatically disconnected, the main circuit is broken. On, the ON light on the panel is off, the OFF light is on, and the limited protection electric furnace). 3. With 485 communication interface (standard when purchasing software) 4. With power-off protection function, that is, when the power is turned on after the power is turned off, the program does not start from the starting temperature, but the furnace temperature rises from the time of power failure. 5. The meter has the function of temperature self-tuning If you want to get an imported temperature controller, you may have the following choices for replacement with extra fees.
Temperature control mode	Intelligent PID
Burnout protection and display	Yes
Over temperature protection	Yes
Overcurrent protection	Yes
Control accuracy	+/- 1 ℃
Trigger	Phase-shifted trigger
Electric appliance	Zhejiang chint
Silicon controlled	106/16E SEMIKRON
Maximum temperature	The first temperature zone:1200℃ The second temperature zone:1200℃
Rated temperature	The first temperature zone:1100℃ The second temperature zone:1100℃
Heating rate	≤20 ℃/ Min (it can be modified as required)
Recommended rate of temperature rise	≤10 ℃/ Min
Thermocouple Type	K Type
Heating length	205mm
Temperature field curve
Peripheral surface temperature	≤45℃
Valve and Flange

RF power supply
(Plasma generator)

Power output range	0-500W
Maximum reflected power	200W
Working frequency	Radio frequency: 13.56MHZ±0.005%
Power stability	+/-0.1%
Harmonic component	≤-50dbc
RF area width	0-600mm adjustable
Matching method	auto
Cooling method	Separate cooling
Noise	<50dB
RF interface	50Ω N-type
Input power	208-240V 50/60HZ

GX gas supply system

GX gas supply System

Mass flowmeter	Range and gas	5, 10, 20, 30, 50, 100, 200, 300, 500SCCM, 1, 2, 3, 5, 10SLM (you can arbitrarily select the above range and the type of gas)
	Withstand voltage	3MP
	Flow control accuracy	±1.0%F.S
	Maximum working (use) pressure	0.3MPa
	Linear	±0.5%F.S
	Repeatability	±0.2% F.S
Ways	1, 2, 3, 4, 5, 6, 7, 8 channels (you can choose several channels)
Connector type	Double ferrule stainless steel joint
System working pressure range	0.1-0.5 MPa
Working temperature	5-45℃
Pressure vacuum gauge	-0.1-0.15 MPa 0.01MPa/div
Static mixing chamber	Dia50*400MM
Connector	Dia6 / 1/4”

VS-0.1 air extraction system(Option 1 or 2)

VS-0.1 air extraction system

Power supply	220V
Dimension	650X650X600 / 650X650X300
Bellows	KF25X1000mm
The vacuum degree of the furnace tube can be reached with this system	10 -1Pa
Vacuum flapper valve	KF25
VRD-8 vacuum pump (Option 1)	Model	VRD-8
	Ultimate partial pressure	5X10-2 Pa
	Inlet and exhaust interface	KF25
	Motor speed	1440RPM
	Pumping rate	2.2L/S
	Motor Power	0.4KW
Preiffer ACP15 oil-free multi-stage Roots pump (Option 2)	Model	ACP15
	Power supply	AC100-240 50/60HZ
	Power	450W
	Weight	25KG
	Maximum helium leak rate	5 · 10-8 Pa m3/s
	Pumping rate	14 m3/h
	Ultimate pressure	0.02Torr
	Inlet and exhaust interface	KF25
Resistance vacuum gauge (Option 1)	Model	ZDR-1
	Power	25W
	Vacuum measurement range	0.1-10 5 Pa
	Resistance silicon	ZJ-52T
Sweden (INFICON) Pirani ceramic capacitor vacuum gauge (Option 2)	Model	PCG554
	Input voltage	24V 1A DC (with 220V transformer)
	Vacuum gauge interface	KF16
	Digital Display	Digital display (screen size is 20x14mm), and its data display unit is torr
	Dimension	46mm×28mm×126mm ( L x W x H)
	Weight	5 lbs
	Detection gas	It can detect various gases, including mixed gases, with accurate measurement and good repeatability.
	Whether it is anticorrosive	Antiseptic
	Response time	≤30ms
	Measuring range	3.8x10-5 -1125 Torr.

Molecular pump unit (optional 1or2)

Molecular pump unit

Unit input voltage	380V /220V
Bellows	KF40X1000
Vacuum flapper valve	KF40
Dimension	600X600X600
Molecular pump (Option 1)	Model	FJ620
	Input voltage	380V
	Molecular pump inlet flange	DN160
	Molecular pump pumping rate L/S (to air)	600
	Ultimate pressure of molecular pump (Pa)	6×10-7
	Cooling method	Water cooling
	Cooling water pressure (MPa)	0.1-0.2
	Cooling water temperature	<25℃
	Ambient temperature	0~40℃
	Recommended starting pressure	<100pa
Molecular pump front vacuum TRP-24(FJ620 molecular pump must be equipped with previous stage pump) (Option 2)	Power	0.75KW
	Voltage	380V
	Rotating speed	1450rpm
	Inlet diameter	KF25/KF40
	Front machine pump suction rate (L/S)	6
	Ultimate pressure	4X10 -2Pa
German Pfeiffer vacuum pump (Option 2)	Voltage	220V
	Power	110W
	Suction port	KF40
	Weight	150KG
	Front pump pumping speed	0.9m 3/ h
	Pumping rate (N2)	33L/S
Compound vacuum gauge	Model	ZDF
	Power supply	220V 55W
	Control precision	± 1%
	Vacuum gauge measuring range	10-5 - 10 5 Pa