1200°C Tube Furnace with Internal Travel Mechanism For HPCVD

Model Number:: TMAX-1200X-S-HPCVD
Compliance:: CE compliant
Warranty:: Two Year Limited Warranty With Lifetime Support
Payment:: T/T, Credit Card, Paypal, LC, Western Union
Delivery Time:: 3 Days

Email:: [email protected]
WhatsApp:: +8618659217588
WeChat:: 18659217588

Product Description

1200°C Tube Furnace with Internal Travel Mechanism For HPCVD

TMAX-1200X-S-HPCVD is a compact 2" split tube furnace with internal sample traveling system inside the processing tube. This allows the position & temperature control of the sample stage or crucible via touch screen digital controller. It is designed for multi-functional rapid thermal processing, such as hybrid physical-chemical deposition(HPCVD), rapid thermal evaporation (RTE), and as well Horizontal Bridgman Crystal Growth ( HDC) under various atmosphere for new generation crystal research.

SPECIFICATIONS:

Split Tube Furnace

208 - 240 VAC, 50/60Hz, 1.2 KW max. power consumption
Working temperature: 1100°C continuous and 1200°C Max.
2" quartz tube (50mm O.D x 44mm I.D x 450mm L) with
vacuum sealed flanges.
Optioanl: you may choose dual zone tube furnace at Pic below
right at extra cost to creat higher thermal gradient or longer constant
temperature zone

-- two zone furnace

Temperature Control

PID automatic control via solid state relay with 30 steps
programmable
Built in Over Temperature and Thermocouple Failure Protection
+/-1°C accuracy
K-type thermal couple
Heating zone length: 200mm ( 8")
Constant temperature zone: 60 mm (+/-1°C @
1000 °C )

Vacuum Sealing

2" quick clamp flange with 1/4'' fittings, vacuum gauge
as well as needle valve on the right side
The right flange is connected to a stainless steel bellow which
is stretchable up to 150 mm.
Left flange with quick-clamped KF25 vacuum port and 1/4'' barb
venting valve
Max. Vacuum level: 10E-2 torr by mechanical pump and 10-E5 by
turbopump

Internal Traveling
Mechanism
&
PLC Control Pannel

One 1/4" Dia. x 24'' long K-type thermal couple is
inserted through the right flange to support a mini-crucible boat
in the chamber.
A step motor can drive the crucible inside the tube from the
heating center to the right end of the furnace, 100 mm max.
Touch screen control panel allows travel distance setting and
temperature display of crucible position
Traveling speed is constant at 180mm/ min. ( variable speed
control is available upon request at additional cost )
A 50x20x20mm mini-crucible boat (~20ml) is installed on a
thermal couple .
AIN Sample Holder or Graphite Flat Substrate Holder for
the wafer is available upon request, additional customization fee will
apply.

Max. Heating & Cooling Rate

The max heating and cooling
rate can be achieved by moving sample into pre-heated hot zone and move the
sample out from hot zone. The typical ramp/cool rate is listed in
below:

Heating
Rate:

10°C/sec (150°C -
250°C);

7°C/sec (250°C -
350°C);

4°C/sec (350°C -
500°C);

3°C/sec (500°C -
550°C);

2°C/sec (550°C -
650°C);
1°C/sec (650°C - 800°C);
0.5°C/sec (800°C - 1000°C);

Cooling Rate:

10°C/sec (950°C - 900°C);

7°C/sec (900°C - 850°C);

4°C/sec (850°C - 750°C);

2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);

Optional Parts

You may need a right angle valve & bellows to connect
a vacuum pump ( click the 1st & 2nd pics to order )
Anti-Corrosive digital Gauge up to 10E-5 torr is optional
for CVD application (Pic 3)
You may order multi-channel gas delivery system for DVD or CVD
operation ( Pic 4)

Dimensions

Warranty

Two years limited warranty
with lifetime support (Consumable parts such as tubes and o-rings are
not covered by the warranty)

Laptop, software & WiFi
Control(Optional)

Brand new laptop with Microsoft Window 10 and Microsoft Office 2013
(30 days free trial) for immediate use.
Labview Based Temperature Control System) enables user to edit
temperature profile, manage heat-treatment recipe, record and plot data
for MTI furnaces.
A wireless remote control provides up to 300 meters operating
range.
Above features are available upon request at an extra cost (up to
$1,000). Please contact us for more information.
Note: The software is only
compatible with MTI’s Yudian Temperature Controller

Compliance

CE Certified
All electric components ( >24V) are UL / MET /
CSA certified
The furnace is ready to pass
TUV(UL61010) or CSA certification at extra cost. （ please

Warning

Tube furnaces with quartz tubes are designed for using under vacuum
and low pressure < 0.2 bars / 3 psi / 0.02 MPa
Attention: A two-stage pressure regulator must be
installed on the gas cylinder to limit the pressure to below 3 PSI for
safe operation.
Vacuum limit definition for all quartz tube furnaces: * Vacuum
pressures may only be safely used up to 1000°C

Application Notes

This multi-functional
furnace is suitable for the applications in below:

RTE: Crucible loaded with evaporation
material is placed in the center of the furnace, move sample holder
to a downstream position with appropriate temperature where the
deposition takes place.
HPCVD： Similar setup as
RTE, we also introduce reactant gas to mix with evaporation vapor and
make deposition
Horizontal Bridgman Crystal Growth： Load material and seed into a crucible and place it in
the center of the furnace. Move the crucible at the desired speed to
grow single crystal under suitable thermal gradient.
If you have any question and suggestion, please
contact us before purchasing
After CVD, the graphene must be transferred from the metal catalyst
to another substrate for most applications. By using the
graphene transfer tape, the residue can be low
For Horizontal directional crystalization (HDC),
you may use a gas feedtrough as pic below