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RF Generator For 50, 80 and 125 Mm OD Tube Furnaces

  • Model Number:

    TMAX-RF
  • Compliance:

    CE certificate
  • Warranty:

    Two years limited warranty with lifetime technical support
  • Delivery Time:

    3 days
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DESCRIPTION

RF Generator For 50, 80 and 125 Mm OD Tube Furnaces


The PECVD system is composed of tube furnace, quartz vacuum chamber, vacuum system, gas supply system and rf power supply system.Mainly used in: metal film, ceramic film, composite film, graphene and other growth.It is easy to increase the function of plasma cleaning etching and etching.The PECVD system has advantages of high deposition rate, good uniformity, consistency and stability.

 

Power output range

  0-500W

Maximum reflected power

 200W

working frequency

RF13.56MHZ±0.005%

Pw stability

+/-0.1%

harmonic component

-50dbc

Rf width

0-600mm adjustable

Matching mode

 AUTO

Cooling mode

air cold

 Noise 

 <50dB

 RF interface

 50Ω   N-type

Input power

 208-240V  50/60HZ

 


1.  We supply machines with battery technology support.

2.  We supply full set of lithium battery equipment for lab research, pilot scale research and production line.



1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

3 Responsible for the damage during the shipping process, will change the damage part for you for free.


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